A study of monolayer doping technology and its application

碩士 === 國立交通大學 === 電子物理系所 === 101 === Nowadays, scaling device down to nanometer-size encounter many fundamental and technological challenges, one of the major challenges is attaining controlled doping of materials. As three-dimension structure is about to replace planar device, it become more crit...

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Bibliographic Details
Main Authors: Wang, Yi-Hong, 王貽泓
Other Authors: Chao, Tien-Sheng
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/07223214591465032735