| Summary: | 碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 101 === In this study, ring resonator sensors with antiresonant reflecting optical waveguide of type B
(ARROW-B) structures have been investigated. The ARROW-B ring resonator sensor was
proposed to provide highly sensitivity characteristics to detect changes in refractive index of the
environment. The ARROW-B waveguide with a thick guiding region can provide efficient
coupling with a single-mode fiber. Modal characteristics of ARROW-B were analyzed with
simulation and designed for obtaining optimum sensitivity in aqueous environment. The
characteristics of ARROW-B structure were analyzed with the transfer matrix method and the
effective index method. We used the 2D-FDTD (finite-difference time-domain) to simulate the
propagation characteristics and sensitivity of the ARROW-B ring resonator sensors. We designed
the gap between the ring and the straight waveguide as 0.2, 0.4, 0.6, and 0.8 μm respectively. The
simulation sensitivities were about 298, 320, 320, and 342 nm/RIU. We also designed a structure
with a capping layer (SiOx) on the bus waveguide. The corresponding simulation sensitivities were
about 320, 340, 320, and 320 nm/RIU respectively. The devices without capping layer were
fabricated and characterized. The sensitivity of the fabricated ARROW-B ring resonator sensor
was obtained as 230.5 nm/RIU for gap 0.4 μm.
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