Effect of the Sandwich Designs of the Si/Al/Si Film in the Specimens on Metal-induced Si Crystallization Efficiency,Carrier Mobility and Electrical Conductivity after Annealing
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 101 === In the present study, 15 kinds of the a-Si/Al/a-Si/SiO2/Glass specimen were prepared in order to investigate the Al-induced Si crystallizations after applying annealing. The composite film of a-Si/Al/a-Si is arranged in the sandwich form in order to improve t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48461912266225995992 |