Fabrication of Seamless Roller Mold with Wavy Microstructures Using Curved Surface Beam Pen Lithography

• Main Authors: Po-YuChen, 陳柏宇
• Other Authors: Yung-Chun Lee
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/71342443817331632940

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 101 === This thesis develops a novel technique, named as mask-less curved surface beam-pen lithography, to fabrication roller molds with seamless and wavy microstructures. This method is modified from planar beam-pen lithography and applied to cylindrical curved surfaces. First of all, an air ring photo-resist (PR) coating system is applied to successfully coat a uniform photo-resist layer on a roller surface. Secondly, the bi-axial excimer laser dragging method is applied to fabricate a one-dimensional (1D) micro-lens array aligned with a slit which restricts the UV light. The micro-lens array converge the parallel incident UV light into a 1D array of focal spots which can be used to expose the PR layer coated on a cylinder. Thirdly, Continuous and seamless wavy patterning on the PR layer coated on the cylindrical surface of the roller is achieved through accurate mechanical alignment and precision rotation control. Finally, a variety of wavy microstructures patterns can be directly fabricated on the metal roller surface by chemical etching process. To further improve the surface roughness, electro-polishing technique is adopted. This patterned metal roller mold is then used in roll-to-roll (R2R) UV roller imprinting of large-area PET film with continuous wavy microstructures.