Investigation of MgBeZnO Thin Films Applied to Multi-Quantum Wells Deep Ultraviolet Light-Emitting Diodes
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 101 === Intrinsic MgZnO (i-MgZnO) and MgBeZnO (i-MgBeZnO) thin films of various component ratios were deposited using a radio frequency (RF) magnetron co-sputter system. Thus deposited films exhibited different energy bandgaps and were stacked alternately to form t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89812385816703863937 |