| Summary: | 碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 101 === Graphene has many excellent features, such as good optical, thermal and mechanical properties, and it becomes a popular material in recent years.
In the experiment, we grow graphene by chemical vapor deposition process. We not only grow high quality single layer graphene, but also grow snow-flake graphene at lower pressure. By changing the parameters, we can grow large grain size graphene which was over 500um, and grow snow-flake graphene with nano-gaps. And the gaps of snow-flake graphene can be merged to grow continuous film.
After using scanning electron microscopy (SEM), electron-backscatter diffraction (EBSD), and atomic force microscope (AFM) to analysis graphene and copper, we observed snow-flake graphene growing on different copper crystals, and we found that the graphene shape, nucleation, coverage on copper, branch growth direction and the step on copper surface are related to the crystal orientation of copper surface. It means that CVD graphene growing on copper not only affect by the parameters such as pressure, gas flow rate, and temperature, but also crystal orientation of copper surface.
In addition, the experiment also used pump oil containing hydrocarbon polymer to grow graphene, and we also observed the effect of pump oil on graphene growth.
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