A Study of Formation pn-Homojunction Diode by Diffusion of ZnS into CuIn1-xAlxS2 Film via Sulfurization
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 101 === In this thesis, the CuInAl metallic precursors were deposited by sputtering. The composition ratio of the precursors and how the layers were stacked will influence the grain size and morphology of the post-selenized film. In my experiment, three differe...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/50428614611183337982 |