Study of Silicon Carbide Growth by Physical Vapor Transport Method Through Development of a Numerical System
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 101 === Physical vapor transport method (PVT) is the major process for silicon carbide bulk production. In this study, thermal and flow numerical simulation system for high-temperature PVT crucible is built by finite element method (FDM), including electromagneti...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71187163877043855686 |