Design and Fabrication of Micro-Acceleration Switch

• Main Authors: Yong-Ren Wu, 吳永仁
• Other Authors: Chi-Hsiang Pan
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/38806340364460463562

碩士 === 國立勤益科技大學 === 機械工程系 === 101 === In this thesis, we propose micro acceleration switches based on bi-stable structures which can transit between two steady-state positions quickly. Two types of the bi-stable structures are designed: one is centrally-clamped parallel beam type and the other is compliant-mechanism type. Varying values of the parameters, such as length, width, tilt angle and curve radius of the bi-stable structures, are designed for sensing different accelerations. Analytical and finite element approaches are used to analyze the performance of the switches. Miniature acceleration switches in centimeter-scale are fabricated in advance to demonstrate the feasibility of the design. Finally, the micro-scale acceleration switches are fabricated using SOI wafer by MEMS techniques.