Fabrication of a tristable micromechanism by electroforming
碩士 === 國立中興大學 === 精密工程學系所 === 101 === This research work by the UV-LIGA process in place of the traditional Silicon-based micromachining. We manufactured Ni tristable micromechanism on glass substrates with lithography and electrodeposition. And using the measurement system platform to promote the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/765cph |