Atomic layer deposition of oxide semiconductor films and their applications in the transparent conductive layers of GaN-based light emitting diodes

博士 === 國立中興大學 === 物理學系所 === 101 === In this dissertation, metal oxide films including zinc oxide (ZnO), gallium doped zinc oxide (GZO), indium doped zinc oxide (IZO) and indium oxide (In2O3) were grown by using atomic layer deposition (ALD). Diethylzinc (DEZn), triethylgallium (TEGa), trimethylindiu...

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Bibliographic Details
Main Authors: Kuo-Yi Yen, 嚴國藝
Other Authors: Jyh-Rong Gong
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/28772128445799934264

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