Effects of Silicon Contents on the Microstructure and Mechanial Properties of CrZrSiN Thin film
碩士 === 明志科技大學 === 材料工程研究所 === 101 === The ten CrZrSiN thin films with various silicon contents were fabricated by a magnetron sputtering process. The influences of silicon contents on the microstructure, mechanical and tribological properties of CrZrSiN films were investigated in this work. The vari...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20619182487278983522 |