NiSi and NiGe Thin Films For Optical Recording Media
碩士 === 明志科技大學 === 材料工程研究所 === 101 === In this study, metal induced crystallization (MIC) mechanism was investigated. The NiSi / Si blayered and NiGe / Ge thin films were prepared by four guns magnetron sputtering system. Thermal analysis shows that the NiSi / Si bilayer films have two phase transiti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02184446834660008851 |