| Summary: | 碩士 === 明道大學 === 材料科學與工程學系碩士班 === 101 === In this study of improvement of the CrAlSiN coatigs by treating with low temperature annealing under nitrogen atmosphere. The results turn out the improvements of the CrAlSiN coating in field of wear and corrosion under low and medium temperature treatment. Therefore, we believe that is worth to proceed our study on CrAlSiN coatings by using duplex process with PVD and plasma ion bombardment heat treatment. It is well known that plasma includes high energy ion, radical and electron which can enhance the chemical reaction between species and heating. Therefore, the prompt heating of the coating without heating the substrate is possible. The coatings are deposited by using cathodic arc deposition system with Cr and Al88Si12 dual targets, after the deposition, the plasma ion bombardment annealing treatments are conducted by controlling pressure, bias voltage under different atmosphere including air and nitrogen. The best result of the coating is then applied to the cutting tool.
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