The Discriminant Analysis for the Distribution of Wafer Defect
碩士 === 銘傳大學 === 應用統計資訊學系碩士班 === 101 === The spatial random defects in the wafer are usually caused by the particle cluster in the atmosphere or due to some process that does not meet the required specification. Thus, there should be some spatial pattern for the defects in the wafer. Since the spatia...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22148622896112856468 |