Studies on the Nanoindentation Technique for Measuring the Mechanical Properties of the Metal Films at Elevated Temperatures
碩士 === 龍華科技大學 === 工程技術研究所 === 101 === In this study, the effects of changing temperature on mechanical properties of nano metal structure were studied by using nanoindenters and thermal stage. Firstly, the impact of using basic materials in the production of semiconductor water was not considered in...
Main Authors: | Wu, Chin-Hsing, 吳進興 |
---|---|
Other Authors: | Ting, Kuen |
Format: | Others |
Language: | zh-TW |
Published: |
2013
|
Online Access: | http://ndltd.ncl.edu.tw/handle/27263828037607036405 |
Similar Items
-
Temperature dependent mechanical property of PZT film: an investigation by nanoindentation.
by: Yingwei Li, et al.
Published: (2015-01-01) -
Using Nanoindentation to Measure the Mechanical Properties of Photoresist Thin Films at Various Temperature
by: Yang Pao Hsiang, et al.
Published: (2005) -
Polydimethylsiloxane Mechanical Properties Measured by Macroscopic Compression and Nanoindentation Techniques
by: Wang, Zhixin
Published: (2011) -
Using Nanoindentation and Nanoscratach to Measure the Mechanical Properties of Evaporation Thin Films
by: SUN, CHANG-EN, et al.
Published: (2005) -
Study of Bulge Test, Nano Tensile Tester, and Nanoindentation System for Mechanical Properties Measurement of Thin Films
by: Wu, Chung Lin, et al.
Published: (2009)