Studies on the Nanoindentation Technique for Measuring the Mechanical Properties of the Metal Films at Elevated Temperatures

碩士 === 龍華科技大學 === 工程技術研究所 === 101 === In this study, the effects of changing temperature on mechanical properties of nano metal structure were studied by using nanoindenters and thermal stage. Firstly, the impact of using basic materials in the production of semiconductor water was not considered in...

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Bibliographic Details
Main Authors: Wu, Chin-Hsing, 吳進興
Other Authors: Ting, Kuen
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/27263828037607036405