Numerical Study for Nanoimprint Lithography
碩士 === 國立高雄應用科技大學 === 資通產品研發與生產碩士外國學生專班 === 101 === Nanoimprint lithography is a promising technology to produce fine-scaled patterns with the advantages of high throughput, low cost and high resolutions. With the field of study on thermal-NIL, the present study was to focus on numerical analyzing t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19557854472017512139 |