Study of optimal polishing recipe for glass removal rate using Taguchi method
碩士 === 國立高雄應用科技大學 === 化學工程與材料工程系碩士在職專班 === 101 === In the study, we use Taguchi method to obtain the best grass removal rate in the different polishing parameters. We made the 0.7mm thickness optical glass substrates with cerium oxide slurry and polishing pad In the fixed polishing time, we chose th...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38580050041893028440 |
| Summary: | 碩士 === 國立高雄應用科技大學 === 化學工程與材料工程系碩士在職專班 === 101 === In the study, we use Taguchi method to obtain the best grass removal rate in the different polishing parameters. We made the 0.7mm thickness optical glass substrates with cerium oxide slurry and polishing pad In the fixed polishing time, we chose the significant polishing parameters affecting by glass substrate thickness removals as condition factor. Taguchi’s orthogonal arrays L18(21×35) are chosen to set up the experiment. After polishing, we examine the result of glass substrate thickness removals and then analyze the data to gain the optimal polishing parameter of glass substrate thickness removals.
According to the result of signal to noise ratio, we made the optimal factor of glass substrate thickness removals in the unit time as platen speed. After experiment, the difference of signal to noise ratio between prediction parameters and the actual polishing results is only 0.48(dB). The experiment in this study could effectively improve the efficiency of thinning the glass substrate polishing process.
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