| Summary: | 碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 101 === The purpose of this thesis is to develop a micro permanent magnet synchronous motor with optical rotary encoder. The micro motor and its optical encoder are fabricated using MEMS technologies to reduce size. The light signal is transmitted through an optical fiber so the motor structure can be packaged easily. The rotating angle, speed and direction can be detected by asymmetric light source and incremental encoder disk.
Two types of micro motors, 1 mm and 1.5 mm diameter, are made by a novel fabricating process combining coil windings and electroplated housing of the stator as one integrated part. The 1 mm diameter motor has length of 3.5 mm and output shaft diameter of 0.2mm. The motor can generate output torque 71.7 nNm and reaches maximum speed up to 20,000 RPM at input current of 0.3 A. This motor has surpassed the smallest commercially available motor of 1.5 mm from Namiki company.
The feasibility of the innovative optical encoder is demonstrated using an asymmetric light source and incremental encoder disk at 6 mm diameter commercial motor. The 0.64 mm and 1mm diameter incremental encoders for two micro motors have resolution of 18 CPR and 12 CPR respectively. The optical encoders are successfully integrated and tested in the micro motors. Due to large rotating runout the optical encoders can only detect angle and speed currently.
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