A novel vacuum plasma surface modification process for nanoporous dielectric layers

A novel vacuum plasma surface modification process for nanoporous dielectric layers

碩士 === 逢甲大學 === 材料科學與工程學系 === 101

Bibliographic Details
Main Authors:	Wei-tsang Lai, 賴韋滄
Other Authors:	G.S. Chen
Format:	Others
Language:	zh-TW
Published:	2013
Online Access:	http://ndltd.ncl.edu.tw/handle/96944172625689187277

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