Electrical Transport Properties in Sr-doped Lanthanum Titanate Thin Films with Various Oxygen Contents
碩士 === 大葉大學 === 電機工程學系 === 101 === In this study, we use a magnetron rf sputtering system to deposit Sr-doped lanthanum titanate thin films on SrTiO3 (100) substrate. After deposition, the samples were annealing in-situ with oxygen partial pressure set on 10*10^-5, 6*106-5, 4*10^-5, and < 2*10^-5...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18825957813456487323 |