Preliminary study of ZnO Nanowires in Micro-strain Sensing

• Main Authors: I-Hao Lin, 林逸豪
• Other Authors: Ming Chang
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/95308432037838869322

碩士 === 中原大學 === 機械工程研究所 === 101 === The purpose of this research is to measure the piezo-resistive property of ZnO nanowires and discuss the possibility of applying this property to the mesaurement of micro-strain.　A nano-manipulator was developed to perform the nano-manipulation of ZnO nanowires on Si wafers inside the vacuum chamber of the scanning electron microscope. Once a nanowire was placed on the substrate, the two ends of the nanowire were sputtered with Au as the measurement electrodes. When the substrate was deformed with the operation of the nano-manipulator, the nanowire was synchronously deformed along with the substrate. The variances of piezo-resistivity for several sets of series and parallel connections of ZnO nanowires under different normal strains were measured. The strain of nanowires was calculated from images of the scanning electron microscope, and the corresponding piezo-resistivity was simultaneously measured with a Wheatstone bridge. Experimental results show that the gauge factor for three nanowires in series connection was 4.07, which is roughly twice of the commercial strain gauge. This shows that the idea of using ZnO nanowires in series connection to develop a micro-strain sensor is possible.