Research on Correlation between Capillary Effect and Thin-Film Width of the Self-Adjusting Blade Coating Process and Feasibility of an Associated In-Line Thickness Measurement

• Main Authors: Cheng-Tse Kuo, 郭承擇
• Other Authors: Jung-Wei Cheng
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/29502405648654180336

碩士 === 國立中正大學 === 機械工程學系暨研究所 === 101 === Thickness control of self-adjusting blade coating will face two issue. The first one is how to measure the thickness? And second one is what the correlation between capillary effect and film’s thickness? Issue 1: We develop an in-line sensor which can measure the thickness was added on self-adjusting blade coating machine. We test the machine to discuss the feasibility about thickness measurement. Finally, we confirm that the machine can detect thickness in micro scale. Issue 2: We used Surface Evolver to simulate the shape of liquid which in front of the blade. And then, constructing mathematical model to deduce the capillary force of the liquid which on the flow channel in a slit between blade and substrate. We also discuss about the influence of capillary effect with self-adjusting blade coating process. We find that if the substrate’s velocity is higher, the film’s width will not affect obviously by capillary effect. But if the substrate’s velocity is lower, we are not yet to draw conclusions.