Resonant frequency measurements of the nano film

• Main Authors: YING-YI CHENG, 鄭英毅
• Other Authors: Yung-Cheng Wang
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/16468024104920108762

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 100 === Due to the rapid growth of the high technology industries, the quality require-ments of the components become more stringently. The most important property of the micro-relay is resonant frequency, because the Young''s modulus and residual stress can be calculated by the resonance frequency of the relay. In the fast devel-opment of the technological of the integrated circuits, the product dimensions have been miniaturized. It is difficult to measure objects with the line width of 600 nm. And the scanning detection can be artificially controlled and verified only. The main purpose of this study is to construct a novel Michelson interferometer which offers the automatic measurement and calculation, analysis and accumulating signal data, and the experiemental results show that the measuring range of frequen-cies20kHz~ 450kHz and amplitude over 5 nm can be achieved by the proposed au-tomatic measurement system.