| Summary: | 碩士 === 國立雲林科技大學 === 電子與光電工程研究所碩士班 === 100 === In this thesis, the sensing properties of the chlorine and the pH sensing devices were discussed, and the chlorine and pH sensing devices applied to wireless measurement system and water quality monitoring system. The pH sensing membrane (ruthenium dioxide (RuO2)) was deposited on the silicon substrate by radio frequency (R. F.) sputtering system. The selective membrane of chlorine ion was prepared on the pH sensing membrane thin film by spin coating method. As well as, the sensing performance of the chlorine and pH sensing device with different manufacturing conditions were analyzed by using voltage-time system (V-T system) and electrochemical impedance spectroscopy (EIS). The quality of sensing device was measured by EIS before measurement, and the sensitivity and linearity of the sensing device was measured by V-T measurement system.
The response time of the chlorine and pH sensing devices were less than 30 s and 10 s, respectively. The sensitivity and linearity of the pH sensing device were 55.27 mV/pH and 0.999, respectively. The sensitivity and linearity of the chlorine sensing device were 10.04 mV/ppm and 0.996 in sodium chloride (NaCl) solution, respectively. The sensitivity and linearity of the chlorine sensing device were 15.33 mV/ppm and 0.990 in sodium hypochlorite (NaClO) solution, respectively. Moreover, the lifetime of the chlorine sensing device was immersed at least 14 days in NaCl or NaClO solutions; the lifetime of the pH sensing device was immersed at least 15 days in pH buffer solutions. According to the experimental results, chlorine and pH sensing devices can be applied to water quality monitoring system with wireless measurement system for real-time measurement and long-term measurement.
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