Investigate of the impact on Deposited Aluminum Doped Zinc Oxide Transparent Conductive Thin Films by UV and Ozone assisted

• Main Authors: Yen-cheng Chen, 陳彥成
• Other Authors: Feng-Ming Pai
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/44138064409475882324

碩士 === 國立雲林科技大學 === 材料科技研究所 === 100 === This study investigated the influence of an ozone atmosphere and ultraviolet light of varying frequency bands on the fabrication of aluminum-doped zinc oxide (AZO) transparent conductive film. We followed the methods described in a previous study in using a PGME-based (propylene glycol methyl ether) precursor to fabricate the AZO film. A simple, low-cost sol-gel method was employed in place of expensive vacuum equipment. We analyzed the properties of the thin film to determine the influence of ultraviolet light and ozone. We first performed a series of analyses to identify the optimal doping concentration of aluminum for AZO film fabricated in a PGME solvent system. During the fabrication process, which included drying, carbon removal, sintering, and annealing, we administered ultraviolet light of varying frequency bands and maintained an ozone atmosphere, to obtain AZO film with a C-axis preferred orientation. X-ray diffraction identified the crystalline structure of the thin film. We observed the surface morphology and the roughness of the film using field emission microscopy and atomic force microscopy, respectively, to verify improvements in the quality of the thin film. We further employed ultraviolet-visible spectroscopy, the four-point probe method, Hall measurements, and PL to analyze the optical and electrical properties of the thin film.