Fabrication of Titanium Oxide Thin Film Transistors by Atomic Force Microscopy Local Anodic Oxidation
碩士 === 大同大學 === 光電工程研究所 === 100 === The metal-titanium oxide thin film transistors (TFTs) were fabricated by local anodic oxidation (LAO) technology of atomic force microscopy (AFM).Firstly, we used photolithography technology to make a pattern on the metal thin film area as electrode, used DC Sputt...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/49458575867058385942 |