| Summary: | 碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 100 === The 1st part of this thesis is to animate the working principle of the sporangial capillary structure for making bionic tail rudders of micro aerial vehicles ( MAVs ) . Two kinds of materials including SU-8 resist and stainless steel foil are used. The corresponding SU-8 LIGA-like process and the Nd : YAG laser cutting are performed as well. The surface modification techniques are added to enlarge the capillary actuation force. Finally, the fabricated tail rudders are installed on the vertical stabilizer of a MAV for testing.
The 2nd part of this thesis is to refer the prior MEMS Wankel engine and to replace the working fluid of water with mercury. Regarding MEMS process,inductive coupled plasma ( ICP ) etching and the PDMS molding method are used for making the engine wall. Another glass slide is evaporated with metal electrodes for power heating, temperature sensing and cooling. After coating a parylene isolation layer, the PDMS engine body is bonded to the glass slide via oxygen plasma treatment. Finally, the engine is filled with mercury and sealed on a print circuit board for the heating testing and for moving the rotor as well.
|
|---|
