Common-path Laser Encoder and Its Application in Nanopositioner with Compound Stage
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 100 === Commonly used laser encoders are in non-common path. The non-common path configuration between the measurement and reference beams are subject to environmental disturbances. These disturbances directly make measured signals noisy and cannot be essentially s...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/13193925983684842149 |