Atomized liquid affect the performance of the flow field
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 100 === In recent years, large areas of flat etching process more and more widely, with the surface area of the larger etching process, resulting in many uneven etching rate of the phenomenon, this article focuses on using both the atomization nozzle flow rate of i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03344069590405722230 |