Atomized liquid affect the performance of the flow field

碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 100 ===   In recent years, large areas of flat etching process more and more widely, with the surface area of the larger etching process, resulting in many uneven etching rate of the phenomenon, this article focuses on using both the atomization nozzle flow rate of i...

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Bibliographic Details
Main Authors: HSIAO-HSUAN WANG, 王孝瑄
Other Authors: 李宗翰
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/03344069590405722230