Modeling and control of a biaxial PZT actuated flexible-base-stage using CSS
碩士 === 國立臺北科技大學 === 機電整合研究所 === 100 === This paper presents a micropositioner which utilizes a monolithic flexure-based mechanism and is actuated by the embedded piezoelectric actuators to achieve the translations in the X- and Y-axes. Due to the nonlinear hysteresis of piezoelectric actuators, flex...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/fjjt47 |