Recovery of cutting liquid by membrane filtration and separation of silicon and silicon carbide using a modified settling unit
碩士 === 國立臺北科技大學 === 資源工程研究所 === 100 === In silicon wafer manufacturing, a large amount of slurry waste is produced and feedstock is wasted during cutting process. Recovery of silicon carbide, cutting liquid and kerf silicon will be a good solution to reduce waste and costs. This study investigated r...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/v3n3sh |