| Summary: | 碩士 === 國立臺北科技大學 === 光電工程系研究所 === 100 === In this thesis, we present a simple pulsed laser deposition method for the synthesis of MgZnO films.High Mg-content, wurtzite MgZnO films were grown on sapphire (0001) substrates by pulsed laser deposition. The room-temperature photoluminescence (PL) of the MgZnO films is dominated by UV emission, which blueshifts with increasing x. Mg content in single-phase wurtzite MgZnO films increases significantly from 5 close to 20 at. %, and corresponding band gap is widened from 3.44 to 3.69 eV. Moreover, the effects of growth parameters such as oxygen pressure, substrate temperature and nitrogen pressure,on the morphology and the optical properties of the deposited MgZnO thin films were also studied in some details. In summary Our conclusion show that the incorporation of nitrogen can be enhanced Mg solubility into Mg x Zn 1-x O thin film ,which agrees with our experiments.
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