| Summary: | 碩士 === 南台科技大學 === 奈米科技研究所 === 100 === The main purpose of this study is to develop a three degree of freedom optical vibration measurement probe with low cost, high precision and small size. It improved from the pick-up head inside the DVD player available on the market, and from two in-line laser beams by beams splitter to design.
In the one-degree of freedom measurement probe, a optical pick-up head is adopted measurement system. With the focus error signal (FES) of an S curve measured by a four-quadrant sensor with reference to the linear area to correspond position, to determine displacement between work-piece and pick-up head, and to get Z-axis vibration. In the two-degree of freedom measurement probe, to dismantle lens and voice coil from pick-up head, using as a light source develop a autocollimators, and the four-quadrant sensor as the optical receiver components in experiment. To calculated the X and Y axis angle variation, and then get the X and Y-axis vibration.
In this study applied to small work piece surface by three degrees of freedom in vibration measurement, the production of a micro-cantilever beam and a sense of vibration structure of the actual test. By experimental validation, the micro-cantilever beam in the ANSYS analysis results 127.47Hz, the actual measured resonant frequency 130.12Hz error of 2.07%; Quality of sense of vibration in the ANSYS analysis of the results of X, Y, axis the same for the 92.439Hz X axis of the actual measuring the resonance frequency is 90.63Hz, the error is 1.96%; Y axis the actual measuring the resonant frequency 90.38Hz, the error is 2.23 %.
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