Properties of Co-Sputtered Ag-Ge and Ta-Ge Thin Films
碩士 === 國立虎尾科技大學 === 材料科學與綠色能源工程研究所 === 100 === Silver and its alloys have bean promising in the multilevel metallization of semiconductor devices because of their superior electrical resistivity and resistance to electromigration. In this study, Ta-Ge and Ag-Ge thin films have been deposited o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/jtty8p |