Friction Compensation for Nanoscale Tracking Control Method

• Main Authors: Jang-Jia Yang, 楊櫂嘉
• Other Authors: 沈金鐘
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/daqk67

碩士 === 國立虎尾科技大學 === 自動化工程研究所 === 100 === In the mechanical control system, there exist friction force, and it can degrade the performance of the control system. Especially in high-precision system, the effect of friction can’t be ignored. To overcome the effects of friction, the best way is to establish a friction model of the system and use this model to compensate the system. In this paper, the Maxwell slip model based inverse friction model is proposed. This inverse model takes both the system dynamics and friction force into account. For estimating the parameters of this model, a two-phase hybrid optimization scheme is used. The first phase utilizes Genetic Algorithm-based optimization and the second phase utilizes Minimized Least Square method. Finally, the inverse model used the feed forward controller in combination in combination with PID controller and Sliding-mode controller as the feedback controller in used to control a linear guide way supported stage to demonste the performance of the proposed method.