Electrical and Optical Properties of ITO Thin Films Deposited on Glass and Polymer Substrates by DC Magnetron Sputtering

• Main Authors: CHIA-SHING YU, 余嘉興
• Other Authors: Kuo, Dong-Hau
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/14613264068821007622

碩士 === 國立臺灣科技大學 === 醫學工程研究所 === 100 === This thesis contains two sections. In the first section, ITO thin films on glass substrates and different plastic substrates of PC, PET, and COC were deposited by DC magnetron sputtering at room temperature. The electrical and optical properties, composition, and microstructure of these films were investigated. In the second section, the variations of properties with the oxygen flow rate and plasma output power for films coated on PET substrates were explored. The results showed that the electrical resistivity of ITO films increased with the increase in the oxygen content but it did not change with the plasma output power. The indium and tin contents in ITO films were also not functions of the oxygen content and the output power. All the deposited ITO films had close compositions even they were deposited at different conditions. The lowest electrical resistivity of 1.8?e10-3 ??cm was obtained for the ITO films deposited at plasma power of 75W and the oxygen flow rate of 0 sccm. This film had a optical transmittance of 81% under a visible light with a wavelength of 589 nm. This film also showed a (222) preferred growth plane.