Electrical and Optical Properties of ITO Thin Films Deposited on Glass and Polymer Substrates by DC Magnetron Sputtering
碩士 === 國立臺灣科技大學 === 醫學工程研究所 === 100 === This thesis contains two sections. In the first section, ITO thin films on glass substrates and different plastic substrates of PC, PET, and COC were deposited by DC magnetron sputtering at room temperature. The electrical and optical properties, composition...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14613264068821007622 |