Study of Bipolar Resistive Switching in Copper-doped Tantalum Oxide Thin Films Prepared by Plasma Oxidation
碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 100 === A thin copper-doped tantalum oxide (Cu-TaOx) film was prepared by plasma oxidation of a copper-doped tantalum nitride (Cu-TaN), and its resistance switching behavior was studied. A Cu-TaN film was firstly deposited by co-sputtering as a bottom electrode, then...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80178226980350476572 |