Deep Depletion Behavior in the Photoresponse of MOS Capacitors with Ultrathin Oxides

碩士 === 國立臺灣大學 === 電子工程學研究所 === 100 === In this thesis, deep depletion behavior of MOS capacitors with ultrathin oxides is of major concern, while the photoresponse of each sample is also included for better understanding of this behavior. First, MOS capacitors with simple square patterns are fabrica...

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Bibliographic Details
Main Authors: Li Lin, 林立
Other Authors: Jenn-Gwo Hwu
Format: Others
Language:en_US
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/28003339526980220915