Investigation of ZnO Gas Sensors

• Main Authors: Wei-Ting Hsu, 徐瑋廷
• Other Authors: Shih-Wei Tan
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/15889676592800870729

碩士 === 國立臺灣海洋大學 === 電機工程學系 === 100 === The development of metal - semiconductor - metal type zinc oxide carbon monoxide sensor. This study is based on zinc acetate as precursor, the sol gel method and spin coating method, made of nanometer (200nm) P-type ZnO film, as the semiconductor material used to select platinum as the sensing of the production of components metal, because platinum upgrade adsorption of oxygen. Into the gas measurement process, are all sensing element placed in a stainless steel chamber, access to carbon monoxide at a fixed flow rate (500ml/min) - air (or nitrogen) gas mixture, and then the current through the semiconductor parameter analyzer. - voltage, current - time equivalent measure.