CVD growth of carbon nanotubes over gold particles
碩士 === 國立臺南大學 === 材料科學系碩士班 === 100 === Here we use spin coating to disperse 0.024 M~0.0024 M Tetrachloroauric acid (HAuCl4・4H2O) on silicon wafer, then through CCVD (Catalyst-enhanced Chemical vapor deposition) to grow carbon nanotubes. Carbon source was chosen as helium-diluted ethylene, different...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/69849068874866848947 |