Characterization of Structure and Mechanical Properties of TiZrN Thin Films Deposited by DC Unbalanced Magnetron Sputtering: Effect of Nitrogen Flow Rate
碩士 === 國立清華大學 === 工程與系統科學系 === 100 === Nanocrystalline TiZrN thin films were deposited on Si (001) substrates by unbalanced magnetron sputtering. The objective of the study is to investigate the effect of nitrogen flow rate on the structure and properties of the TiZrN films with nitrogen flow rangin...
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87894822548697040058 |