Development of MEMS Devices and Circuits by Using Wafer-Level CMOS MEMS Processes
博士 === 國立清華大學 === 電子工程研究所 === 100 === This thesis proposes wafer-level complementary metal oxide semiconductor (CMOS) micro-electro-mechanical systems (MEMS) processes whose steps are fully compatible with standard CMOS process and have the potential for mass production. A monolithic capacitive acce...
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85837677553190150456 |