Different fracture approaches to induce ripple patterns on non-irradiated and irradiated photoresist film
碩士 === 國立清華大學 === 材料科學工程學系 === 100 === The experiment results are divided into two parts. Part one: the photoresist thin film is first sandwiched by two rigid Si substrates. After heating and pressing, those sandwiched specimens are separated by three kinds of approaches to induce periodic cracked r...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05928876016603804134 |