A New Morphology-based Approach for Similarity Searching on Wafer Bin Maps in Semiconductor Manufacturing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 100 === Due to the ever greater complexity of processes involved in semiconductor manufacturing, increasingly high inspection costs associated with defective wafers have become a critical concern of modern manufacturers. More importantly, because current high-dimens...
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| Format: | Others |
| Language: | zh-TW |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35181359269387971046 |