The Use of Reflection Anisotropy Spectroscopy in Characterisation of Polyimide Thin Films

碩士 === 國立中山大學 === 光電工程學系研究所 === 100 === Rubbing on polyimide thin film surface is an important procedure of alignment in the commercial display industry. Present on the surface of friction anisotropy, there will be corresponding to the pre-tiltangle. Monitoring and quality controlling of rubbing pro...

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Bibliographic Details
Main Authors: Shu-Yu Lai, 賴書鈺
Other Authors: Wenjun Zheng
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/49158069043918902928
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Summary:碩士 === 國立中山大學 === 光電工程學系研究所 === 100 === Rubbing on polyimide thin film surface is an important procedure of alignment in the commercial display industry. Present on the surface of friction anisotropy, there will be corresponding to the pre-tiltangle. Monitoring and quality controlling of rubbing procedure will be the major issue. Reflection Anisotropy Spectroscopy is a powerful monitoring technology. Reflection Anisotropy Spectroscopy is a non-destructive detective system. Through optical method we could get property of our samples without damaging. After our process of survey, samples could be used in next manufactured step. In this thesis, we detected that monomers would occur some changes in a small amount in room temperature. We could find those changes effect the peak region of RA spectra and the feature in pretilt angle.