Optimization of zirconia thin-film deposition on Ti-6Al-4V surfaces via magnetron sputtering by Fuzzy-Taguchi method

• Main Authors: Chun-Hui Chu, 朱峻輝
• Other Authors: Ting-Fu Hong
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/57947490360723617712

碩士 === 國立屏東科技大學 === 材料工程所 === 100 === The purpose of this study is to use the Fuzzy-Taguchi multi-objective experimental design method for optimizing the sputtering coating zirconia thin film process on Ti-6Al-4V substrate for a better hydrophobicity and wear resistance performances. The surface morphology, roughness, chemical composition, crystalline structure, interfacial properties, hardness of the samples were observed to find out the combination with dual-objective properties of wettability and wear resistance. The results show that both the hydrophobicity and wear resistance of Ti-6Al-4V substrate surfaces can be enhanced after coating of zirconia films, where the optimum contact angle value in the first stage and second stage experiment is 101 ° and 102 °, respectively, which is about 59% increased compared with raw surfaces; and the optimum hardness of the coated samples in the first and second stage of experiment design is 574Hv and 524Hv, respectively, which is about 82% increased compared with raw substrate. Finally, the optimum sputtering parameters of above experiments were conducted to the fuzzy theory to find out an optimum process with dual-objective properties of hydrophobicity and wear resistance.